Features
of the equipment
·
Chamber:
SS304 (300 x 400) D type
·
Vacuum:
10-6 mbar (TMP + Rotary pump)
·
Gas
inlet: MFC 100 sccm (1)
·
Thermal
mode: 200A, 10 V supply
·
E-beam
mode: 3kW, 180°, 4 crucibles
|
Unique features/Measurement
capabilities, if any
|
Instrument
Technical Description and Major Specifications (This Specifications Limited
to Major 5)
|
Measurement/Sample
specifications:
·
Any
metal, metal alloy (granules)
|